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ETRI Technology

High sensitivity , high selectivity MEMS formaldehyde gas sensor technology

High sensitivity , high selectivity MEMS formaldehyde gas sensor technology


  • Monitor electrical resistance of elements depending on oxygen adsorption change through gas oxidation / reduction on detected substances (metal oxide)
  • Adsorption of oxidizing gas -> Decrease conductive electronics ->Increase conductivity of detected substance (for p-type material) 
  • Adsorption of reducing gas -> Supply conductive electronics ->Decrease conductivity of detected substance (for p-type material)
  • Heating (150-300 degrees) is required for effective response of gas oxidation / reduction on the surface of metal oxide.
  • Conventional bulk heaters composed of metal line on alumina consume large amount of power. MEMS heater is developed for gas sensor having low power consumption.






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