Subminiature Gas Sensor Technology for Managing Indoor Air Quality

• Senses gas by a change of electrical resistance occurred by electron swap between sensing material and gas, and activates reaction by partially heating with heater.
  
• Sensing material uses a method evaporating large area like screen printing, inkjet printing, chemical vapor deposition, sputtering, and etc. 
• Especially making high-thermal efficiency and high-stiffness designed micro heater with CMOS-MEMS process and applying it to gas sensor, enables materialization of subminiature low-power-consumption sensor.