High sensitivity , high selectivity MEMS formaldehyde gas sensor technology

• Monitor electrical resistance of elements depending on oxygen adsorption change through gas oxidation / reduction on detected substances (metal oxide)
  
• Adsorption of oxidizing gas -> Decrease conductive electronics ->Increase conductivity of detected substance (for p-type material) 
• Adsorption of reducing gas -> Supply conductive electronics ->Decrease conductivity of detected substance (for p-type material)
  
• Heating (150-300 degrees) is required for effective response of gas oxidation / reduction on the surface of metal oxide.
  
• Conventional bulk heaters composed of metal line on alumina consume large amount of power. MEMS heater is developed for gas sensor having low power consumption.

Contact Info.: Su-Jin Youn, +82-42-860-5092, sjy@etri.re.kr