Subminiature Gas Sensor Technology for Managing Indoor Air Quality
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- Date2017.03.10
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Subminiature Gas Sensor Technology for Managing Indoor Air Quality
- Senses gas by a change of electrical resistance occurred by electron swap between sensing material and gas, and activates reaction by partially heating with heater.
- Sensing material uses a method evaporating large area like screen printing, inkjet printing, chemical vapor deposition, sputtering, and etc.
- Especially making high-thermal efficiency and high-stiffness designed micro heater with CMOS-MEMS process and applying it to gas sensor, enables materialization of subminiature low-power-consumption sensor.
Contact Info.: Su-Jin Youn, +82-42-860-5092, sjy@etri.re.kr