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장비현황

물성분석실험실

HOME 장비현황 물성분석실험실

SEM

Maker(model)
  • FEI(Sirion400)
Application
  • Surface Morphology Elements Analysis of Thin Film
  • Resolution : 1.5nm
  • EDS Resolution : 127eV
SEM

AES

Maker(model)
  • Thermo Electron(Microlab 350)
Application
  • Surface Composition Analysis
  • Small Area Composition Analysis
  • Surface Resolution : 7nm
  • Energy : 0 ~ 2,500eV
AES

ESCA

Maker(model)
  • VG scientific(Escalab200R)
Application
  • Chemical Bonding Analysis
  • Insulator Thin Film Analysis
  • Energy Resolution : 0.2eV
  • Energy : 0 ~ 2,500eV
ESCA