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Technology Status

Support Technologies

HOME Technology Status Support Technologies

  • The sole government-funded research institution equipped with the infrastructure capable of the batch fabrication of semiconductors


  • Support for various semiconductor component/manufacturing process technologies, including power semiconductors (IGBT, MCT, Thyristor, SiC SBD), and sensors, developed over 30 years of research and development, along with analysis/package support


  • Support for semiconductor unit process fabrication

    • Photo : Stepper/Contact Align, PR Coating, PR Ashing, Descum, CD SEM
    • Etch : Oxide/Metal/Nitride/Poly-Si Dry Etch, Wet Etch, PR Strip, Poly/Oxide CMP
    • Diffusion : Wet/Dry Ox., Anneal, Alloy, RTP, POCl3 Doping, Ion Implanter
    • Thin Film : TEOS, HTO, LTO, SiON, Nitride, BPSG, Poly-Si, Metal(Al, Ti, Ni, Cr, TiW.)